SILICON
MICROSTRUCTURES
IN CO R P ORAT ED
2003
Silicon Microstructures, Inc.
♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: 408-577-0100
♦ Fax: 408-577-0123 ♦ sales@ si-micro.com ♦ www.si-micro.com
SM5112
Harsh Environment Absolute
Silicon Pressure Die
• OEM ABSOLUTE SILICON PRESSURE SENSOR DIE FOR HARSH
ENVIRONMENTS
• REAR ENTRY FOR PROTECTION OF THE PIEZORESISTIVE BRIDGE
NETWORK – ONLY SILICON AND GLASS EXPOSED
DESCRIPTION
The SM5112 is a silicon micro-machined,
piezoresistive pressure-sensing chip. The
SM5112 is designed for harsh environments
where absolute pressure needs to be
accurately measured. These devices are
available in full-scale ranges from 15 to 300
psi and are ideal for OEM and high volume
applications.
Provided in die form, these sensors can be
mounted on ceramic or PC board substrates
as part of an OEM system. They also may
be packaged into proprietary, or application
specific sensor lines.
Die are probed, inked and diced, and
shipped on tape.
Custom pressure ranges available in high-
volume applications.
FEATURES
•
High Volume, Low Cost
•
Absolute Version
•
Constant Current or Constant Voltage
Drive
•
Millivolt Output
•
15, 30, 60, 150 and 300 PSI Ranges
Available
APPLICATIONS
•
Altimeters
•
Tire Gauges
•
Medical Instrumentation
•
Industrial Sensors
•
Diving Modules
•
Home Appliances
Rev 1.1 10_04
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