データシートサーチシステム
  Japanese  ▼
ALLDATASHEET.JP

X  

P2A データシート(PDF) 1 Page - MKS Instruments.

部品番号 P2A
部品情報  Mass Flow Contro ller for Ion ImplanT Applicatiotions
Download  4 Pages
Scroll/Zoom Zoom In 100%  Zoom Out
メーカー  MKS [MKS Instruments.]
ホームページ  https://www.mksinst.com/
Logo MKS - MKS Instruments.

P2A データシート(HTML) 1 Page - MKS Instruments.

  P2A Datasheet HTML 1Page - MKS Instruments. P2A Datasheet HTML 2Page - MKS Instruments. P2A Datasheet HTML 3Page - MKS Instruments. P2A Datasheet HTML 4Page - MKS Instruments.  
Zoom Inzoom in Zoom Outzoom out
 1 / 4 page
background image
Features & Benefits
• MaximizesSDSsourcegasutilization
reducing bottle changes resulting in
higher tool uptime and lower cost-of-
ownership
• Repeatedlycontrolslowgasflows
allowing for reduced gas consumption
using parameters optimized for
implanter source applications
• Digitalcontrolloopprovidesrapid
response to set point minimizing process
cycle time
• Increasestooluptimethroughreduction
of “No Problem Found”: MFC
replacements
—Included embedded diagnostics and
software allowing users to check MFC
functionality without removing the
MFC
—E-diagnostics through embedded
Ethernet interface allows monitoring
performance parameters during
operation
• Directform-fit-functionreplacementfor
most common MFCs
• Reducesinventorycoststhroughmulti-
gas, multi-range capability
• Straightforwardconfigurationand
diagnostics through Ethernet interface
—Uses standard web browser – no
special software required
—Includes remote PC application
• BrightrotatableLEDdisplayprovides
easy viewing of flow rate, gas type, full
scale flow range, temperature and
Ethernet address
Protected under one or more of the following
U.S. patents: No. 6,668,641, No. 6,668,642, No.
6,779,394, No. 6,868,862, No. 6,810,308, No.
7,004,191 or International Patents and Patents
pending.
πMFC – Low Pressure
MASS FlOw COnTROllER
FOR IOn IMPlAnT APPlICATIOnS
The PFC-20, Low Pressure
πMFC mass flow controller provides maximum utilization of
Safe Delivery Source gases. Implementation of the Low Pressure
πMFC increases tool
uptime by reducing the frequency of source gas cylinder changes. It offers accurate and
precise control of low gas flows over a wide pressure range with source gas delivery
pressure as low as 4 Torr.
This
πMFC is the latest in MKS products designed specifically for SDS and VAC® source
gases serving the ion implantation industry. The patented valve and sensor designs offer
exceptional zero stability and accuracy for all flow conditions while maintaining the ability
to rapidly achieve set point and repeatably control the gas flow. Standard-sized MFC
footprint and control I/O are compatible with existing gas lines for easy integration and
operation.


同様の部品番号 - P2A

メーカー部品番号データシート部品情報
logo
GOOD-ARK Electronics
P2A GOOD-ARK-P2A Datasheet
384Kb / 5P
   Surface Mount Glass Passivated Standard Rectifier
logo
Bud Industries, Inc.
P2A-110 BUD-P2A-110 Datasheet
46Kb / 1P
   RELAY RACK PANELS
logo
NIKO SEMICONDUCTOR CO.,...
P2A06BT NIKOSEM-P2A06BT Datasheet
220Kb / 5P
   N-Channel Logic Level Enhancement Mode Field Effect Transistor
logo
Altech corporation
P2AF1 ALTECH-P2AF1 Datasheet
248Kb / 1P
   22 mm Thermoplastic Enclosure Flush Momentary Operator P2AFx
P2AF2 ALTECH-P2AF2 Datasheet
248Kb / 1P
   22 mm Thermoplastic Enclosure Flush Momentary Operator P2AFx
More results

同様の説明 - P2A

メーカー部品番号データシート部品情報
logo
MKS Instruments.
P4B MKS-P4B Datasheet
257Kb / 4P
   Multi-gas/Multi-range Mass Flow Contro ller
P9B MKS-P9B Datasheet
323Kb / 4P
   Pressure Insensitive, Multi-gas/Multi-range Mass Flow Contro ller
1179C MKS-1179C Datasheet
259Kb / 4P
   General Purpose Mass-Flo Contro ller
P250A MKS-P250A Datasheet
329Kb / 4P
   Multi-gas/Multi-range Mass Flow Contro ller for Flow rates up to 250 slm
1640 MKS-1640 Datasheet
228Kb / 4P
   Pressure-Based Mass FlowController For Ion Implant Applications
logo
Sensortechnics GmbH
AWM3150V SENSORTECHNICS-AWM3150V Datasheet
205Kb / 6P
   Mass flow sensor for gases
AWM92100V SENSORTECHNICS-AWM92100V Datasheet
162Kb / 6P
   Mass flow sensor for gases
FHAL200DU SENSORTECHNICS-FHAL200DU Datasheet
88Kb / 4P
   Mass flow sensors for gases
AWM720P1 SENSORTECHNICS-AWM720P1 Datasheet
81Kb / 4P
   Mass flow sensor for gases
AWM42300V SENSORTECHNICS-AWM42300V Datasheet
198Kb / 6P
   Mass flow sensor for gases
More results


Html Pages

1 2 3 4


データシート ダウンロード

Go To PDF Page


リンク URL




プライバシーポリシー
ALLDATASHEET.JP
ALLDATASHEETはお客様のビジネスに役立ちますか?  [ DONATE ] 

Alldatasheetは   |   広告   |   お問い合わせ   |   プライバシーポリシー   |   リンク交換   |   メーカーリスト
All Rights Reserved©Alldatasheet.com


Mirror Sites
English : Alldatasheet.com  |   English : Alldatasheet.net  |   Chinese : Alldatasheetcn.com  |   German : Alldatasheetde.com  |   Japanese : Alldatasheet.jp
Russian : Alldatasheetru.com  |   Korean : Alldatasheet.co.kr  |   Spanish : Alldatasheet.es  |   French : Alldatasheet.fr  |   Italian : Alldatasheetit.com
Portuguese : Alldatasheetpt.com  |   Polish : Alldatasheet.pl  |   Vietnamese : Alldatasheet.vn
Indian : Alldatasheet.in  |   Mexican : Alldatasheet.com.mx  |   British : Alldatasheet.co.uk  |   New Zealand : Alldatasheet.co.nz
Family Site : ic2ic.com  |   icmetro.com